Focado em Elétrica, Eletrônica, Telecomunicações e Automação Industrial.
(Focused on Electrical, Electronics, Telecommunications and Industrial Automation).
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Overview:
Semiconductor manufacturing demands high productivity, high quality, and most importantly product safety. INFICON’s SemiQCMTM, as part of the FabGuard®-enabled
Smart Sensor portfolio, allows users to minimize downtime, monitor and
optimize wafer processing, and ensure product safety with a compact,
simple to use technology.
SemiQCM
provides in-situ and real-time monitoring of deposition rates in
critical areas of deposition, etch and other semiconductor equipment.
Users can monitor the presence of process materials to ensure that tools
and gas delivery systems are working properly. SemiQCM can measure
small changes in the film deposition thickness and rate, to gain insight
into processes occurring directly on the wafer. This information can
also be used to predict maintenance activities to increase uptime and
minimize particle risk.
By
incorporating the SemiQCM data with the tool-wide FabGuard System,
users are able to get a complete view of how the machine is operating
and how systems are interacting. SemiQCM is a key part of the INFICON
overall Smart Sensing Ecosystem.
What you’ll learn:
SemiQCM system overview
How SemiQCM is being used for precursor delivery monitoring
Technique to detect chamber clean endpoint
On-wafer and process chamber deposition monitoring
SemiQCM as part of the INFICON FabGuard Smart Sensor Ecosystem
Presented by:
Jonathan David Semi Market Manager
INFICON
Jonathan David is the Semi Market Manager at
INFICON. He has an M.Sc. in Physics and has more than 15 years of
industry experience working with semiconductor equipment manufacturers
and end-users across a variety of applications.
