LED Illumination for Semiconductor Inspection & Metrology

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Why Use LED Illumination for Wafer Optical Inspection and Metrology

The ever-increasing demands of output, yield and performance are pushing optical inspection and metrology tools to work harder, with greater precision, better repeatability and faster throughput.  

Illumination performance is critical across the semiconductor manufacturing process, especially where lamp-based systems are still in use.

Are you still using halogen, xenon, or laser-induced plasma?

CoolLED LED Illumination solutions provide:

  • Fast, precise wavelength and intensity control 
     
  • Stable, uniform output 
  • Broadband and multispectral imaging capability 
  • Long lifetime, maintenance free
  • Flexibility needed for OEM integration 

Powerful LEDs help increase throughput with improved control, while wavelength coverage from 300–1900 nm and up to 10 independently controllable channels allow CoolLED technology to be tailored to the stringent demands of modern semiconductor inspection and metrology systems. 
Amora Series Spectral Coverage: UV to SWIR

About CoolLED

For over 20 years, CoolLED has designed and manufactured high-power LED illumination solutions for demanding scientific and industrial applications. Our technology delivers bright, stable and repeatable illumination across the UV, visible, NIR and SWIR regions.
Find Out More

CONTACT US
www.oemillumination.com
info@coolled.com
Tel : +44 (0) 1264 323040

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