NEW Webinar — Precision Fluid Measurement in Advanced Node Fabs

 

Register Can’t attend the live webinar?  Register and we will send you a link to watch the recording at your convenience. Overview: At 3 nm and 2 nm, fluid measurement is no longer a facilities concern, it’s a yield variable. CMP slurry uniformity, wet chemistry mix accuracy, and ultrapure chemical delivery stability all trace directly to within-wafer non-uniformity, defectivity, and tool throughput. Yet the measurement options available to fab engineers — Coriolis, ultrasonic, differential pressure — each fail in different ways under the conditions advanced nodes impose. This webinar session offers a vendor-agnostic look at how to think about flow and pressure measurement across the three fluid regimes that dominate the modern fab: CMP slurries, aggressive wet chemistries, and ultrapure water and adjacent specialty fluids. We’ll walk through where each measurement technology genuinely belongs, where datasheet accuracy is misleading, and how to specify and qualify instrumentation against your actual chemistries and duty cycle, not reference conditions. The goal is practical: leave with a clearer framework for matching technology to chemistry, an honest view of trade-offs, and a checklist of questions to bring to your next vendor conversation.   What you'll learn: Why fluid measurement is now a yield variable, and which process steps amplify measurement uncertainty into wafer-level defectivity   How to evaluate flow technologies for CMP slurry: Coriolis, ultrasonic, and differential pressure, including where each fail in real production   Material and method selection for HF, SC1/SC2, TMAH, IPA, and UPW — chemistry compatibility, contamination risk, and density-aware measurement   A vendor-agnostic decision framework for choosing between Coriolis, clamp-on ultrasonic, and inline pressure measurement   Advanced-node scaling considerations: connectivity, EtherNet/IP, EtherCAT, FDC integration, and predictive maintenance signals   Specification mistakes to avoid and a four-phase qualification protocol you can adapt for your own evaluations   Presented by:  Jay Rajagopalan, Sr. Director, Engineering and Product Management Malema, a PSG Brand   About the Presenter: Jay Rajagopalan is Sr. Director of Engineering and Product Management at Malema, a PSG brand. He brings over 35 years of experience spanning engineering, sales, and product management. Throughout his career, Jay has played a key role in the development of a wide range of flow meters and flow controllers serving the semiconductor and life sciences industries. He holds a degree in Electronics Engineering and an MBA.

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