XY-ROTARY SYSTEMS for PRECISION APPLICATIONS
Call Us: (215) 728-6804 Request A Quote LARGE APERTURE XY - ROTARY SYSTEMS for HIGH PRECISION APPLICATIONS XY STROKE 100 .. 300 mm APERTURE 150 ... 350 ROTATION 360 deg XY RESOLUTION 0.5 micron THETA RESOLUTION 0.5 arc-sec The demand for a high accuracy stages is met with IntelLiDrives integrated XY-ROTARY systems that addresses the needs of scanning microscopy, wafer and printed circuit board inspection, semiconductor manufacturing and many others where precision is important. Very precise fine positioning and control is easily achieved with servo controllers compatible with EtherCAT, CANOpen, RS-232, USB, Ethernet/IP interfaces. These stages fitted with DIRECT DRIVE LINEAR MOTORS or BALL SCREW and ROTARY axes for smooth scanning applications as well for fast index motions with fast se...
