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Register Can’t attend the live webcast?  Register and we will send you a link to watch the recording at your convenience. Overview: Semiconductor manufacturing demands high productivity, high quality, and most importantly product safety.  INFICON’s SemiQCMTM, as part of the FabGuard®-enabled Smart Sensor portfolio, allows users to minimize downtime, monitor and optimize wafer processing, and ensure product safety with a compact, simple to use technology. SemiQCM provides in-situ and real-time monitoring of deposition rates in critical areas of deposition, etch and other semiconductor equipment.  Users can monitor the presence of process materials to ensure that tools and gas delivery systems are working properly.  SemiQCM can measure small changes in the film deposition thickness and rate, to gain insight into processes occurring directly on the wafer.  This information can also be used to predict maintenance activities to increase uptime and minimize particle risk. By incorporating the SemiQCM data with the tool-wide FabGuard System, users are able to get a complete view of how the machine is operating and how systems are interacting.  SemiQCM is a key part of the INFICON overall Smart Sensing Ecosystem. What you’ll learn: SemiQCM system overview How SemiQCM is being used for precursor delivery monitoring Technique to detect chamber clean endpoint On-wafer and process chamber deposition monitoring SemiQCM as part of the INFICON FabGuard Smart Sensor Ecosystem   Presented by:  Jonathan David Semi Market Manager INFICON Jonathan David is the Semi Market Manager at INFICON.  He has an M.Sc. in Physics and has more than 15 years of industry experience working with semiconductor equipment manufacturers and end-users across a variety of applications.

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